Quick SOP Soft lithography – PDMS molds – January 2023, A. Blednov
This is the most common recipe used in the Michael Smith Laboratory soft lithography cleanroom.
- Mix 6g curing agent with 54g of elastomer base into the single use cup
- Cup + mixture total weight should equal 260g
- NB: if total weight is different, adjust mixer to appropriate counter balance
- Put in mixer and use the automatic recipe (60s mixing + 120s foaming)
- Put cup in degas chamber
- Follow steps written on chamber to evacuate the degas chamber
- Leave in degas chamber until bubbles no longer visible on top of mixture (at least 1hr)
- In a plastic petri, place micro-mold and pour degassed mixture on top of micro-mold
- Put in the 80°C incubator for curing (at least 1 or 2 hours)
- Take out and peel PDMS layer from micro-mold
- Place PDMS, pattern up, and glass substrate in the oxygen plasma chamber
- Pump down plasma chamber to 300 mTorr
- Introduce oxygen to 650 mTorr pressure
- Turn plasma power to high for 30s
- Open plasma chamber and immediately put together the PDMS and the glass substrate
- Place device in 80°C incubator for 1 hour